Beam injection studies of dislocations and oxygen precipitates in semiconductor silicon

Solid State Phenomena

Volumn 78-79, Issue , 2001, Pages 57-64

  Pizzini, S ^a   Binetti, S ^a   Le Donne, A ^a   Leoni, E ^a   Acciarri, M ^a   Salviati, G ^a   Lazzarini, L ^a  

^a UNIVERSITY OF MILAN   (Italy)

Author keywords

Cathodo luminescence; Dislocations; Oxygen precipitates; Photoluminescence; Silicon

Indexed keywords

ANNEALING; CATHODOLUMINESCENCE; DISLOCATIONS (CRYSTALS); LIGHT EMISSION; NUCLEATION; OXYGEN; PHOTOLUMINESCENCE; PRECIPITATION (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

BEAM INJECTION; OXYGEN PRECIPITATES;

SEMICONDUCTING SILICON;

EID: 0034999470     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.78-79.57     Document Type: Conference Paper

References (16)