High sensitive and wide dynamic range navigation microsystem on a single chip

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4236, Issue , 2001, Pages 134-140

  Varadan, V K ^a   Jose, K A ^a   Varadan, V V ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; GYROSCOPES; MICROELECTROMECHANICAL DEVICES; MIRRORS; SENSORS; SUBSTRATES; TRANSMITTERS; VIBRATION MEASUREMENT;

SURFACE ACOUSTIC WAVES (SAW);

ACCELEROMETERS;

EID: 0034980305     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.418750     Document Type: Conference Paper

References (4)

1. Design and fabrication of wireless remotely readable MEMS based microaccelerometers
2. Conformal MEMS-IDT gyroscopes and their comparison with fiber optic gyro
3. Design and development of a MEMS-IDT gyroscope