Experimental determination of energy resolution and transmission characteristics of an electrostatic toroidal spectrometer adapted to a standard scanning electron microscope

Journal of Electron Spectroscopy and Related Phenomena

Volumn 105, Issue 2-3, 1999, Pages 119-127

  Berger, D ^a   Filippov, M ^b   Niedrig, H ^a   Rau, E I ^b   Schlichting, F ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

BSE spectra correction; BSE spectroscopy in SEM; Spectrometer calibration; Spectrometer characteristics; Toroidal energy analyzer

Indexed keywords

EID: 0000443550     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0368-2048(99)00036-5     Document Type: Article

References (28)

1. H. Ibach, Electron spectroscopy for surface analysis, in: Topics in Current Physics, Vol. 4, Springer, Berlin, 1977.
2. M.P. Seah, Surface and Interface Analysis 2 (1980) 222.
3. W. Steckelmacher, J. Physics E: Sci. Instrum. 6 (1973) 1061.
4. H. Seiler, Ultramicroscopy 17 (1985) 1.
5. R.C.G. Leckey, J. Elect. Spectros. Rel. Phenom. 43 (1987) 183.
6. D. Roy, D. Tremblay, Rep. Prog. Phys. 53 (1990) 1623.
7. E.I. Rau, V.N.E. Robinson, Scanning 18 (1996) 556.
8. H. Niedrig, E.I. Rau, Nucl. Instrum. Methods Phys Res. B 142 (1998) 523.
9. V.V. Aristov, E.I. Rau, E.B. Yakimov, Phys. Stat. Sol.(a) 150 (1995) 675.
10. F. Schlichting, D. Berger, H. Niedrig, E.I. Rau, in: Electron Microscopy 1996 (Proc. 11th EUREM, Dublin), CESM, Brussels, 1998, pp. I-279.
11. F. Schlichting, D. Berger, H. Niedrig, in: H.A. Calderon, M.J. Yacaman (Eds.), Electron Microscopy 1998 (Proc. 14th ICEM, Cancun), Inst. Phys. Publishing, Bristol, 1998, pp. II-349.
12. E.I. Rau, B. Schindler, L. Reimer, in: Electron Microscopy 1996 (Proc. 11th EUREM, Dublin), CESM, Brussels, 1998, pp. I-336.
13. F. Toffoletto, R.C.G. Leckey, J.D. Riley, Nucl. Instrum. Methods Phys Res.: B 12 (1985) 282.
14. R.G. Smeenk, R.M. Tromp, H.H. Kersten, A.J.H. Boerboom, F.W. Saris, Nucl. Instrum. Methods 195 (1982) 581.
15. G.J.A. Hellings, H. Ottevanger, C. Knibbeler, J. van Engelshoven, H. Brongersma, J. Elect. Spectros. Rel. Phenom. 49 (1989) 359.
16. A. Ghielmetti, E. Shelley, Nucl. Instrum. Methods Phys. Res. A 298 (1990) 181.
17. M.I. Yavor, H. Wollnik, M. Nappi, B. Hartman, Nucl. Instrum. Methods Phys. Res. A 311 (1992) 448.
18. H.A. Engelhardt, W. Back, D. Menzel, H. Liebl, Rev. Sci. Instrum. 52 (1981) 835.
19. R.C.G. Leckey, J.D. Riley, Appl. Surf. Sci. 22-23 (1985) 196.
20. D. Roy, J.D. Carette, J. Appl. Phys. 42 (1971) 3601.
21. G.G. Kurbatov, V.I. Zaporozchenko, J. Elect. Spectros. Rel. Phenom. 53 (1990) 29.
22. L.T. Weng, G. Vereecke, M.J. Genet, P. Bertrand, W. Stone, Surface Interface Anal. 20 (1993) 179.
23. C.S. Hemminger, T.A. Land, A. Christie, J.C. Hemminger, Surface Interface Anal. 15 (1990) 323.
24. D. Berger, M. Filippov, H. Niedrig, E.I. Rau, F. Schlichting, in: H.A. Calderon, M.J. Yacaman (Eds.), Electron Microscopy 1998 (Proc. 14th ICEM, Cancun), Inst. Phys. Publishing, Bristol, 1998, pp. IV-449.
25. H.D. Bauer, Exp. Technik Physik 27 (1979) 331.
26. H.H. Hubbel, W.J. McConnel, R.D. Birkhoff, Nucl. Instrum. Methods 31 (1964) 331.
27. D. Roy, J.D. Carette, Appl. Phys. Lett. 16 (1970) 413.
28. H. Froitzheim, H. Ibach, S. Lehwald, Rev. Sci. Instrum. 46 (1975) 1325.