Identification of potential deadlock set in semiconductor track systems

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2, Issue , 2001, Pages 1820-1825

  Hyun Joong Yoon, ^a   Doo Yong Lee, ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; COMPUTATIONAL COMPLEXITY; COMPUTER SYSTEM RECOVERY; GENETIC ALGORITHMS; INTELLIGENT CONTROL; MATRIX ALGEBRA; PHOTOLITHOGRAPHY;

POTENTIAL DEADLOCK SETS; SEMICONDUCTOR TRACK SYSTEMS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034868453     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Deadlock avoidance in flexible manufacturing systems with concurrently competing process flows
2. Trends in track system architecture
3. A petri net based deadlock prevention policy for flexible manufacturing systems
4. Automatic synthesis of colored petri nets for the control of FMS
5. Event-based feedback control for deadlock avoidance in flexible production systems
6. Deadlock avoidance for production system with flexible routing
7. Accommodating FMS operational contingencies through routing flexibility
8. Deadlock prevention and deadlock avoidance in flexible manufacturing systems using petri net models
9. Detection of deadlocks in flexible manufacturing cell
10. Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing