Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing

Proceedings of the IEEE International Conference on Systems, Man and Cybernetics

Volumn 3, Issue , 1998, Pages 2291-2296

  Yim, Seong Sin ^a   Lee, Doo Yong ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

SCHEDULING; SILICON WAFERS; SIMULATED ANNEALING;

CLUSTER FABRICATION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032317974     PISSN: 08843627     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)