Optimal Scheduling techniques for cluster tools with process-module and transport-module residency constraints

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 4, Issue , 2001, Pages 3326-3331

  Rostami, S ^a   Hamidzadeh, B ^a  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

HEURISTIC METHODS; LINEAR PROGRAMMING; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

CLUSTER TOOLS;

MACHINE TOOLS;

EID: 0034868412     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. Integrated processing equipment
2. Coping with the high cost of wafer fabs
3. An optimal periodic scheduling technique for dual-arm robots in cluster tools with process-module residency constraint
4. Single-wafer cluster tool performance: An analysis of throughput
5. Single-wafer cluster tool performance: An analysis of the effects of redundant chambers and revisitation sequences on throughput
6. Simple performance models for integrated processing tools
7. A steady state throughput analysis of cluster tools: Dual-blade versus single-blade robots
8. Mathematical programming solution of a hoist scheduling program
9. Hoist scheduling fora pcb electroplating facility
10. The minimum common-cycle algorithm for cyclic scheduling of two materila handling hoist with time window constraints
11. Cyclic scheduling of a hoist with time window constraints