Vapor pressure of precursors for CVD on the base of platinum group metals

Journal De Physique. IV : JP

Volumn 11, Issue 3, 2001, Pages

  Morozova, N B ^a   Zharkova, G I ^a   Semyannikov, P P ^a   Sysoev, S V ^a   Igumenov, I K ^a   Fedotova, N E ^a   Gelfond, N V ^a  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; CHELATION; CHEMICAL VAPOR DEPOSITION; PHASE TRANSITIONS; THERMODYNAMIC STABILITY; VAPOR PRESSURE; VAPORIZATION;

VOLATILE METAL CHELATES;

PLATINUM METALS;

EID: 0034855162     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:2001377     Document Type: Conference Paper

References (17)