Investigation of thermal properties of ruthenium(III) β-diketonate precursors for preparation of RuO2 films by CVD

Journal of Thermal Analysis

Volumn 46, Issue 6, 1996, Pages 1551-1565

  Bykov, A F ^a   Morozova, N B ^a   Igumenov, I K ^a   Sysoev, S V ^a  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

Author keywords

CVD; Ruthenium diketonates; Thermal stability; Vapour pressure

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM PREPARATION; MASS SPECTROMETRY; PRESSURE EFFECTS; PYROLYSIS; REACTION KINETICS; SUBLIMATION; TEMPERATURE; THERMOANALYSIS; THERMODYNAMIC STABILITY; VAPOR PRESSURE; VAPORIZATION;

RUTHENIUM DIKETONATES; STATIC METHOD WITH A SILICA MEMBRANE GAUGE; TENSIMETRIC FLOW METHOD; THERMOLYSIS PROCESSES; TRISPENTANEDIONATORUTHENIUM; TRISTRIFLUOROPENTANEDIONATORUTHENIUM;

RUTHENIUM COMPOUNDS;

EID: 0030174365     PISSN: 03684466     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF01980761     Document Type: Article

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