Optical surface roughness evaluation of phosphorus-doped polysilicon films

Optics and Lasers in Engineering

Volumn 35, Issue 1, 2001, Pages 1-9

  Ng, T W ^a   Teo, T W ^b   Rajendra, P ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b TECH Semiconduct Singapore Pte L   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); LIGHT ABSORPTION; LIGHT REFLECTION; PHOSPHORUS; SURFACE ROUGHNESS;

POLYSILICON; SPECTRAL ABSORBANCE;

OPTICAL FILMS;

EID: 0034836696     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(00)00107-X     Document Type: Article

References (10)

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