Characterization of magnesium fluoride thin films deposited by direct electron beam evaporation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 2, 2000, Pages 465-469

  Dumas, L ^a   Quesnel, E ^a   Robic, J Y ^a   Pauleau, Y ^b  

^a CEA LETI   (France)

^b GRENOBLE INSTITUTE OF TECHNOLOGY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; COMPOSITION; CRYSTAL MICROSTRUCTURE; DENSITY (SPECIFIC GRAVITY); ELECTRON BEAMS; INFRARED SPECTROSCOPY; MAGNESIUM COMPOUNDS; NUMERICAL METHODS; QUARTZ; RESIDUAL STRESSES; SEMICONDUCTING SILICON; THERMAL EFFECTS;

DEPOSITION TEMPERATURE; ELECTRON BEAM EVAPORATION; MAGNESIUM FLUORIDE; MASS DENSITY;

THIN FILMS;

EID: 0034156372     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582210     Document Type: Article

References (19)

1. B. E. Newman, Laser Focus Fiberopt. Technol. (Newton, Mass.) 18, 53 (1982).
2. H. K. Pulker, Coatings on Glass (Elsevier, New York, 1984).
3. H. K. Pulker and E. Jung, Thin Solid Films 9, 57 (1971).
4. K. H. Guenther, Appl. Opt. 23, 3806 (1984).
5. C. J. Stolz, J. R. Taylor, W. K. Eckelberg, and J. D. Lindh, Appl. Opt. 32, 5666 (1992).
6. U. Kaiser and N. Kaiser, Thin Solid Films 237, 250 (1994).
7. L. Dumas, J.-Y. Robic, and Y. Pauleau, Mater. Sci. Forum 287-288, 255 (1998).
8. B. Hirrien, Ph.D. thesis, INPG Grenoble, 1997.
9. J. P. Borgogno, Ph.D. thesis, Université d'Aix Marseille, 1984.
10. H. Leplan, Ph.D. thesis, INPG Grenoble, 1995.
11. A. Brenner and S. Senderoff, J. Res. Natl. Bur. Stand. 42, 105 (1949).
12. B. A. Movchan and A. V. Demchishin, Phys. Met. Metallogr. 28, 83 (1961).
13. JCPDS Data Cards, 41-1443, International Center of Diffraction Data, Swarthmore, PA, 1988.
14. A. F. Peveyev and J. A. Muranova, Sov. J. Opt. Technol. 40, 186 (1973).
15. U. Kaiser, N. Kaiser, P. Weissbrobt, U. Mademann, E. Hacker, and H. Müller, Thin Solid Films 217, 7 (1992).
16. H. Hiraga, N. Sugawara, S. Ogura, and S. Amano, Jpn. J. Appl. Phys., Part 1 689 (1974).
17. A. Lehmann, W. Heerdegen, G. Schirmer, H. Mutschke, W. Richter, E. Hacker, and R. Dohle, Phys. Status Solidi A 119, 683 (1990).
18. S. Laux and W. Richter, Appl. Opt. 35, 97 (1996).
19. E. H. Hirsh, J. Phys. D 13, 2081 (1980).