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Microelectronic Engineering

Volumn 55, Issue 1-4, 2001, Pages 59-64

Electronic recombinations and ionic transport in BPSG layers

(8) Vedda, A a Carollo, E b Croci, S a Martini, M a Morbiato, A a Spinolo, G a Vitali, M a Zanotti, L c

a UNIVERSITY OF MILANO BICOCCA (Italy)

b UNIVERSITY OF PADOVA (Italy)

c STMICROELECTRONICS (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BOROPHOSPHATE GLASS; BOROSILICATE GLASS; CHEMICAL VAPOR DEPOSITION; IRRADIATION; LIGHT EMISSION; PHOTOLUMINESCENCE; POINT DEFECTS; THERMOLUMINESCENCE; TRANSPORT PROPERTIES;

BOROPHOSPHOSILICATE GLASS FILMS; SUB-ATMOSPHERIC CHEMICAL VAPOR DEPOSITION; THERMALLY STIMULATED LUMINESCENCE (TSL);

AMORPHOUS FILMS;

EID: 0034832498 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-9317(00)00429-9 Document Type: Article

Times cited : (2)

References (9)

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4
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