DUV lasers applied to semiconductor inspection and optical disk mastering

LEOS Summer Topical Meeting

Volumn , Issue , 2001, Pages 23-24

  Kubota, Shigeo ^a   Eguchi, Naoya ^a   Masuda, Hisashi ^a  

^a SONY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CAVITY RESONATORS; CONTINUOUS WAVE LASERS; CRYSTAL GROWTH FROM MELT; NATURAL FREQUENCIES; OPTICAL DISK STORAGE; OPTICAL MICROSCOPY; SOLID STATE LASERS; TRANSFER FUNCTIONS; ULTRAVIOLET DEVICES; ULTRAVIOLET RADIATION;

DEEP ULTRAVIOLET LASERS; OPTICAL DISK MASTERING; SEMICONDUCTOR INSPECTION;

LASER APPLICATIONS;

EID: 0034830434     PISSN: 10994742     EISSN: None     Source Type: Journal    
DOI: 10.1109/LEOSST.2001.941918     Document Type: Article

References (7)