New deep-UV microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3740, Issue , 1999, Pages 394-397

  Eguchi, Naoya ^a   Oka, Michio ^a   Imai, Yutaka ^a   Saito, Masaki ^a   Kubota, Shigeo ^a  

^a SONY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC HEADS; OPTICAL DISK STORAGE; OPTICAL RESOLVING POWER; SEMICONDUCTOR DEVICES; SOLID STATE LASERS; ULTRAVIOLET RADIATION;

ULTRAVIOLET MICROSCOPY;

OPTICAL MICROSCOPY;

EID: 0032596885     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (3)