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Volumn , Issue , 2001, Pages 1227-1232
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A new coiled microspring contact technology
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Author keywords
[No Author keywords available]
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Indexed keywords
DIELECTRIC MATERIALS;
ELASTIC MODULI;
ELECTRIC COILS;
ELECTRONICS PACKAGING;
MATHEMATICAL MODELS;
PHOTOLITHOGRAPHY;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
THERMAL EFFECTS;
THIN FILM DEVICES;
ELASTIC COMPRESSION;
IRREVERSIBLE THERMAL CURVING;
MICROSPRING CONTACT TECHNOLOGY;
THIN FILM METAL BIMORPHS;
WAFER-STAGE FABRICATION;
OHMIC CONTACTS;
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EID: 0034829991
PISSN: 05695503
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (9)
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References (10)
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