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Volumn 34, Issue 3, 2001, Pages
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Perturbation detection of electric force gradients using the phase shift method
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROSTATIC DEVICES;
INTEGRATED CIRCUITS;
MICROSCOPES;
PERTURBATION TECHNIQUES;
PHASE SHIFT;
SENSITIVITY ANALYSIS;
VIBRATIONS (MECHANICAL);
ELECTRIC FORCE GRADIENTS;
ELECTROSTATIC FORCE MICROSCOPY;
FORCE MEASUREMENT;
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EID: 0034825801
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/34/3/101 Document Type: Article |
Times cited : (10)
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References (12)
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