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Volumn 34, Issue 3, 2001, Pages

Perturbation detection of electric force gradients using the phase shift method

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; INTEGRATED CIRCUITS; MICROSCOPES; PERTURBATION TECHNIQUES; PHASE SHIFT; SENSITIVITY ANALYSIS; VIBRATIONS (MECHANICAL);

EID: 0034825801     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/34/3/101     Document Type: Article
Times cited : (10)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.