Excimer laser crystallization of doped and undoped a-Si:H for solar cells

Solid State Phenomena

Volumn 80-81, Issue , 2001, Pages 181-186

  Lengsfeld, P ^a   Christiansen, S ^a   Nerding, M ^a   Rebien, M ^a   Henrion, W ^a   Sieber, I ^a   Nickel, N H ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Doping; Laser crystallization; Polycrystalline silicon; Texture

Indexed keywords

CRYSTALLIZATION; DOPING (ADDITIVES); EXCIMER LASERS; SOLAR CELLS; STRUCTURE (COMPOSITION); THIN FILMS;

EXCIMER LASER CRYSTALLIZATION; POLYSILICON THIN FILM TRANSISTOR;

POLYSILICON;

EID: 0034817559     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.80-81.181     Document Type: Conference Paper

References (8)