Sharply bent optical waveguide on silicon-on-insulator substrate

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4283, Issue , 2001, Pages 610-618

  Sakai, A ^a   Hara, G ^a   Baba, T ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

Finite difference time domain (FDTD) method; Integrated optics; Lightwave circuit; Optical waveguide; Silicon on insulator (SOI)

Indexed keywords

COMPUTER SIMULATION; DENSITY (OPTICAL); ELECTRON BEAM LITHOGRAPHY; FINITE DIFFERENCE METHOD; INDUCTIVELY COUPLED PLASMA; INTEGRATED OPTICS; PLASMA ETCHING; REFRACTIVE INDEX; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES; TIME DOMAIN ANALYSIS;

LIGHTWAVE CIRCUITS;

OPTICAL WAVEGUIDES;

EID: 0034780147     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.432614     Document Type: Conference Paper

References (12)

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