Top surface imaging at 157 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4345, Issue I, 2001, Pages 406-416

  Jamieson, A ^a   Somervell, M ^a   Hoang Vi Tran, ^a   Hung, R ^a   MacDonald, S A ^a   Grant Willson, C ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DEFECTS; DENSITY (OPTICAL); IMAGING SYSTEMS; OPACITY; OPTICAL RESOLVING POWER; PHOTORESISTS; POLYMERS; SURFACE ROUGHNESS;

TOP SURFACE IMAGING (TSI);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034768515     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.436872     Document Type: Conference Paper

References (13)