Optical constants and film thickness calculation based on the ratio of envelopes of the reflectance spectrum

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4517, Issue , 2001, Pages 87-94

  Filippov, V V ^a   Kutavichus, V P ^a  

^a B I STEPANOV INSTITUTE OF PHYSICS   (Belarus)

Author keywords

Optical constants; Reflectance spectra envelopes; Thin films

Indexed keywords

ABSORPTION; ITERATIVE METHODS; LIGHT POLARIZATION; REFLECTION; SPECTROPHOTOMETRY; SPECTRUM ANALYSIS; SUBSTRATES;

OPTICAL CONSTANTS;

THIN FILMS;

EID: 0034765203     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.435955     Document Type: Conference Paper

References (23)

1. Optical probes of organic thin films: Photons-in and photons-out
2. On a technic of determination of the optical constants of thin weakly absorbing layers
3. A simple method for the determination of the optical constants and the thickness of a weakly absorbing thin film
4. Determination of the thickness and optical constants of amorphous silicon
5. Multiple determination of thin-film coating materials
6. Computation of the optical constants of a thin dielectric layer on a transmitting substrate from the reflection spectrum at inclined incidence of light
7. Immersion reflectometry of anisotopic layered structures
8. Optical constants of absorbing thin solid films on a substrate
9. A new method for the determination of the thickness, the optical constants and the relaxation time of weakly absorbing thin films
10. Analytical method of determination of absorbing film optical constants and thickness from reflectance spectra
11. Determination of optical constants of thin film coating materials based on inverse synthesis
12. Complete optical analysis of a non-absorbing thin film on an absorbing substrate by a new method of immersion spectroscopic reflectometry
13. Determination of optical constants of absorbing crystalline thin films from reflectance and transmittance measurements with oblique incidence
14. Flexible construction of error functions and their minimization: Application to the calculation of optical constants of absorbing or scattering thin-film materials from spectrophotometric data
15. Optical-constant calculation over an extended spectral region: Application to titanium dioxid film
16. Procedures and standarts for accurate spectrophotometric measurements of specular reflectance
17. Optical-standard surfaces of single-crystal silicon for calibrating ellipsometers and refractometers
18. Surface roughness effects on the determination of optical properties of materials by the reflection method
19. Reflection of light by a system of nonabsorbing isotropic film-nonabsorbing isotropic substrate with randomly rough boundaries
20. Thin-film analysis based on the ratio of envelopes of the reflectance spectra measured at two incidence angles
21. Reflection and refraction of light by transparent crystals