Thin-film analysis based on the ratio of envelopes of the reflectance spectra measured at two incident angles

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3094, Issue , 1997, Pages 354-359

  Filippov, Valery N ^a  

^a B I STEPANOV INSTITUTE OF PHYSICS   (Belarus)

Author keywords

Optical constants; Reflectance spectra envelopes; Thin films

Indexed keywords

ELLIPSOMETRY; INVERSE PROBLEMS; OPTICAL CONSTANTS; PARAMETER ESTIMATION; POLARIMETERS; REFLECTION; THIN FILMS;

ABSOLUTE MEASUREMENTS; INCIDENT ANGLES; REFLECTANCE SPECTRA ENVELOPES; REFLECTIVITY MEASUREMENTS; THIN FILM ANALYSIS;

OPTICAL FILMS;

EID: 58649097697     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271839     Document Type: Conference Paper

References (13)

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