Reflecting-surface distortion when mirrors are cut to shape

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4343, Issue , 2001, Pages 621-626

  Meda, G ^a  

^a Corning Incorporated ^*  (United States)

Author keywords

Distortion; EUV; Figure change; Lithography; Mirror; ULE

Indexed keywords

LIGHT REFLECTION; OPTICAL GLASS; PHOTOLITHOGRAPHY; POLISHING; RESIDUAL STRESSES; SURFACE PHENOMENA;

REFLECTING SURFACES; SURFACE DISTORTION;

MIRRORS;

EID: 0034758416     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.436717     Document Type: Conference Paper

References (3)

1. High precision photoelastic and ultrasonic techniques for determining absolute and differential thermal expansion of Titania-Silica glasses
2. EUV engineering test stand