ISFET cartridge for electrolyte measurement by micromachinery

Sensors and Actuators, B: Chemical

Volumn 65, Issue 1, 2000, Pages 336-339

  Lee, Young Chul ^a   Cho, Byung Woog ^a   Kim, Chang Soo ^a   Koh, Kwang Nak ^a   Sohn, Byung Ki ^a  

^a Kyungpook National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROLYTES; ENCAPSULATION; ETCHING; FIELD EFFECT TRANSISTORS; GLASS BONDING; MICROMACHINING; PHOTOPOLYMERIZATION; PHOTOSENSITIVITY; SEMICONDUCTING SILICON; SILVER;

QUASI REFERENCE ELECTRODE (QRE); REFERENCE ELECTRODE FIELD-EFFECT TRANSISTOR (REFET);

CHEMICAL SENSORS;

EID: 0034733338     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00429-3     Document Type: Article

References (9)

1. Zemel J.N. Ion-sensitive filed effect transistor and relate device. Anal. Chem. 47:1975;225-268.
2. Sohn B.K., Cho B.W., Kim C.S., Kwon D.H. ISFET glucose sucrose sensors by using platinum electrode and photo-crosslinkable polymers. Sensors and Actuators B. 41:1997;7-11.
3. Sohn B.K., Kim C.S. A new pH-ISFET based dissolved oxygen sensor by employing electrolysis of oxygen. Sensors and Actuators B. 34:1996;435-440.
4. Ewald D., van den Berg A., Grisel A. Technology for backside contacted pH-sensitive ISFETs embedded in a p-well structure. Sensors and Actuators B. 1:1990;335-340.
5. Rogers T., Kowel J. Selection of glass, anodic bonding conditions and material compatibility for silicon-glass capacitive sensors. Sensors and Actuators A. 1992;46-47.
6. van Hal R.E.G., Bergveld P., Engbersen J.F. Fabrication and packaging of mesa ISFET. Sensors and Materials. 8(7):1996;455-468.
7. Hoffmann W., Rapp R. Integrated microanalytical system with electrochemical detection. Sensors and Actuators B. 34:1996;471-475.
8. Barycka I., Zubel I. Silicon anisotropic etching in KOH-isopropanol etchant. Sensors and Actuators A. 48:1995;228-229.
9. Bergveld P., van den Berg A., van den Wal P.D., Skowronska-Ptasinska M., Sudholter E.J.R., Reinhoudt D.N. How electrical and chemical requirements for REFETs may concide. Sensors and Actuators. 18:1989;309-327.