Fabrication and transformation characteristics of reversible shape memory alloy thin film actuators

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 63, Issue 4, 1997, Pages 530-534

  Kuribayashi, Katsutoshi ^a   Shimizu, Seiji ^a   Yoshitake, Masaaki ^a   Ogawa, Sooichi ^a  

^a NONE

Author keywords

Heat process; Micro actuator; Precipitate; Reversible shape memory alloy; Sputter deposition; Thin film; Titanium nickel alloy

Indexed keywords

ACTUATORS; FABRICATION; NICKEL ALLOYS; PERFORMANCE; SPUTTER DEPOSITION; THIN FILMS; TITANIUM ALLOYS;

REVERSIBLE SHAPE MEMORY ALLOYS;

SHAPE MEMORY EFFECT;

EID: 0031117669     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.63.530     Document Type: Article

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