Real time in-situ data acquisition using autonomous on-wafer sensor arrays

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue 1, 2000, Pages 94-97

  Freed, Mason ^a   Krüger, Michiel ^a   Poolla, Kameshwar ^a   Spanos, Costas ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Autonomous operation; In situ data acquitsition; Sensor wafer; Wireless communication

Indexed keywords

SENSOR ARRAYS;

ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; MICROPROCESSOR CHIPS; SENSORS; SILICON WAFERS; THICK FILMS;

DATA ACQUISITION;

EID: 0034583711     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSM.2000.993624     Document Type: Conference Paper

References (4)

1. Autonomous micro-sensor arrays for process control of semiconductor manufacturing processes
2. A deformable grating optical modulator
3. Free-space communication link using a grating light modulator
4. Low-power wireless readout of autonous sensor wafer using MEMS grating light modulator