Autonomous micro-sensor arrays for process control of semiconductor manufacturing processes

Proceedings of the IEEE Conference on Decision and Control

Volumn 4, Issue , 1999, Pages 4179-4184

  Fisher, Darin ^a   Freed, Mason ^a   Spanos, Costas ^a   Poolla, Kameshwar ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CMOS INTEGRATED CIRCUITS; ETCHING; MICROSENSORS; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE MOUNT TECHNOLOGY;

AUTONOMOUS MICROSENSOR ARRAYS; SPATIAL RESOLVED ETCH RATE; TEMPERATURE SENSOR;

PROCESS CONTROL;

EID: 0033307737     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)