Surface acoustic wave propagation properties of 3C-SiC epitaxial films on Si(100)

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1999, Pages 273-276

  Kim, Jin Yong ^a   Na, Hoon Joo ^a   Kim, Hyeong Joon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PIEZOELECTRIC MATERIALS; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON CARBIDE; SINGLE CRYSTALS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

BISTRIMETHYLSILYLMETHANE; EPITAXIAL FILMS; PIEZOELECTRIC THIN FILMS; SURFACE ACOUSTIC WAVE PROPAGATION PROPERTIES;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0033295204     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)