The properties of AlN prepared by plasma nitriding and plasma source ion implantation techniques

Surface and Coatings Technology

Volumn 131, Issue 1-3, 2000, Pages 345-349

  Shim, Yun Keun ^a   Kim, Yoon Kee ^a   Lee, K H ^a   Han, Seunghee ^b  

^a Institute for Advanced Engineering (IAE)   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

AlN; Plasma nitriding; Plasma source ion implantation

Indexed keywords

ALUMINUM; ION IMPLANTATION; NITRIDING; PLASMA TREATMENT; WEAR PREVENTION; WEAR PROBLEM;

EID: 0034531517     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00807-0     Document Type: Conference Paper

References (12)