Characterization of the element distribution within TiN coatings with SIMS

Mikrochimica Acta

Volumn 135, Issue 1-2, 2000, Pages 105-111

  Kolber, Thomas ^a   Piplits, Kurt ^a   Palmetshofer, Leopold ^b   Hutter, Herbert ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

SIMS; Superhard coatings; TiN; Trace elements

Indexed keywords

ALUMINUM; CHLORINE; NICKEL; TITANIUM;

ARTICLE; CHEMICAL COMPOSITION; PHYSICAL CHEMISTRY; QUANTITATIVE ASSAY; STOICHIOMETRY; SURFACE PROPERTY;

EID: 0034519960     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/s006040070025     Document Type: Article

References (7)