Phase recognition in AlN-Ti system by energy dispersive spectroscopy and electron backscatter diffraction

Mikrochimica Acta

Volumn 134, Issue 3-4, 2000, Pages 171-177

  Paransky, Yevgeny M ^a   Berner, Alexander I ^a   Gotman, Irena Y ^a   Gutmanas, Elazar Y ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Electron backscatter diffraction; Energy dispersive spectroscopy; Interface AlN Ti; Scanning electron microscopy

Indexed keywords

ALUMINUM DERIVATIVE; ALUMINUM NITRIDE; PEROVSKITE; SODIUM CHLORIDE; TITANIUM DERIVATIVE; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL COMPOSITION; CHEMICAL REACTION; CRYSTAL STRUCTURE; ELECTRON DIFFRACTION; ENERGY DISPERSIVE SPECTROSCOPY; PHASE TRANSITION; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPY; STRUCTURE ANALYSIS;

EID: 0034519184     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/s006040050063     Document Type: Article

References (12)