Improvement of TFT characteristics by using controlled grains

Materials Research Society Symposium - Proceedings

Volumn 585, Issue , 2000, Pages 109-114

  Takeuchi, F ^a   Suga, K ^a   Mishima, Y ^a   Sasaki, N ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; EXCIMER LASERS; FABRICATION; GRAIN SIZE AND SHAPE; NUCLEATION; SILICON; SUBSTRATES; THERMAL GRADIENTS;

GRAIN STRUCTURE CONTROL;

SEMICONDUCTING FILMS;

EID: 0034511733     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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