Thermal processing of silicon wafers with microwave co-heating

Microelectronic Engineering

Volumn 54, Issue 3-4, 2000, Pages 247-253

  Zohm, H ^a   Kasper, E ^a   Mehringer, P ^a   Muller G A ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE ABSORPTION; HEAT RADIATION; MICROWAVE HEATING; SEMICONDUCTOR DOPING;

MICROWAVE COHEATING;

SILICON WAFERS;

EID: 0034507224     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00413-5     Document Type: Article

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