Structural and vibrational characterization of hydrogenated carbon nitride thin films obtained by laser-induced CVD

Applied Surface Science

Volumn 168, Issue 1-4, 2000, Pages 44-47

  Crunteanu, A ^a,b   Charbonnier, M ^a   Romand, M ^a   Mugnier, J ^a   Alexandrescu, R ^b   Negoita, F ^c   Pantelica, D ^c  

^a UNIVERSITÉ LYON 1   (France)

^b NATIONAL INSTITUTE FOR LASER   (Romania)

^c HORIA HULUBEI NATIONAL INSTITUTE OF PHYSICS AND NUCLEAR ENGINEERING   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EXCIMER LASERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; NITRIDES; RAMAN SPECTROSCOPY; SILICON; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDES; ELASTIC RECOIL DETECTION ANALYSIS; LASER INDUCED CHEMICAL VAPOR DEPOSITION;

THIN FILMS;

EID: 0034506254     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00579-1     Document Type: Article

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