Rapid high-resolution X-ray diffraction measurement and analysis of MOVPE pHEMT structures using a high-brilliance X-ray source and automatic pattern fitting

Journal of Crystal Growth

Volumn 221, Issue 1-4, 2000, Pages 520-524

  Lafford, Tamzin ^a   Taylor, Mark ^a   Wall, John ^a   Loxley, Neil ^a  

^a Bede Scientific Instruments Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT REFLECTION; METALLORGANIC VAPOR PHASE EPITAXY; QUALITY CONTROL; SEMICONDUCTOR DEVICE STRUCTURES; X RAY CRYSTALLOGRAPHY; X RAY TUBES;

BRIGHTNESS; PSEUDOMORPHIC HIGH ELECTRON MOBILITY TRANSISTORS (PHEMT);

HIGH ELECTRON MOBILITY TRANSISTORS;

EID: 0034504521     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00762-4     Document Type: Article

References (6)

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6. Arndt U.W., Duncumb P., Long J.V.P., Pina L., Inneman A. J. Appl. Crystallogr. 31:1998;733.