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Volumn 605, Issue , 2000, Pages 171-176

Characterization of low temperature, wafer-level gold-gold thermocompression bonds

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION PROTECTION; CRACK PROPAGATION; DELAMINATION; ELECTRONICS PACKAGING; FRACTURE TOUGHNESS; LOW TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; OXIDATION RESISTANCE; PLASTIC DEFORMATION; PRESSURE; SEMICONDUCTOR DEVICE MODELS; STRAIN RATE;

EID: 0034498678     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (16)

References (11)
  • 1
    • 0031177094 scopus 로고    scopus 로고
    • Low-temperature intermediate au-si wafers bonding; eutectic or suicide bond
    • R.F. Wolffenbuttel. Low-temperature intermediate au-si wafers bonding; eutectic or suicide bond. Sensors and Actuators A, 62:680-686, 1997.
    • (1997) Sensors and Actuators A , vol.62 , pp. 680-686
    • Wolffenbuttel, R.F.1
  • 3
    • 0028429727 scopus 로고
    • Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature
    • R.F. Wolffenbuttel and K.D. Wise. Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature. Sensors and Actuators A, 43:223-229, 1994.
    • (1994) Sensors and Actuators A , vol.43 , pp. 223-229
    • Wolffenbuttel, R.F.1    Wise, K.D.2
  • 8
    • 0025383329 scopus 로고
    • Development of a test method for measuring the mixed mode fracture resistance of bimaterial interfaces
    • P.G. Charalambides, H.C. Cao, J. Lund, and A.G. Evans. Development of a test method for measuring the mixed mode fracture resistance of bimaterial interfaces. Mechanics of Materials, 8:269-283, 1990.
    • (1990) Mechanics of Materials , vol.8 , pp. 269-283
    • Charalambides, P.G.1    Cao, H.C.2    Lund, J.3    Evans, A.G.4
  • 9
    • 71149121504 scopus 로고
    • Mixed mode cracking in layered materials
    • J.W. Hutchinson and T.Y. Wu, editors, Academic Press
    • J.W. Hutchinson and Z. Suo. Mixed mode cracking in layered materials. In J.W. Hutchinson and T.Y. Wu, editors, Advances in Applied Mechanics, volume 29. Academic Press, 1991.
    • (1991) Advances in Applied Mechanics , vol.29
    • Hutchinson, J.W.1    Suo, Z.2
  • 10
    • 0016557114 scopus 로고
    • Effect of surface contamination on the thermocompression bondability of gold
    • J.L. Jellison. Effect of surface contamination on the thermocompression bondability of gold. IEEE Transaction on Parts, Hybrids and Packaging, PHP-11:206-211, 1975.
    • (1975) IEEE Transaction on Parts, Hybrids and Packaging , vol.PHP-11 , pp. 206-211
    • Jellison, J.L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.