Wavelet characterization of the submicron surface roughness of anisotropically etched silicon

Surface Science

Volumn 470, Issue 1-2, 2000, Pages L57-L62

  Moktadir, Z ^a   Sato, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ATOMIC FORCE MICROSCOPY; ETCHING; SURFACE ROUGHNESS; WAVELET TRANSFORMS;

SCALEGRAM METHOD;

SILICON;

EID: 0034497991     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(00)00895-5     Document Type: Article

References (13)

1. K. Sato, M. Shikida, T. Yamashiro, M. Tsunekawa, S. Ito, Sensors Actual. 73 (1999) 122-130.
2. K. Petersen, Proc. IEEE 70 (5) (1982) 420-457.
3. K. Sato, M. Shikida, T. Yamashiro, M. Tsunekawa, S. Ito, Sensors Actual. 73 (1999) 122-130.
4. P. Meakin, Fractal, Scaling and Growth Far From Equilibrium, Cambridge University Press, Cambridge, MA, 1998.
5. A.L. Barabarasi, H.E. Stanley, Fractal Concepts in Surface Growth, Cambridge University Press, Cambridge, MA, 1995.
6. R.M. Finne, D.L. Klein, J. Electrochem. Soc. 114 (1967) 965.
7. H. Seidel, L. Csepregi, A. Heuberger, H. Baumgartel, J. Electrochem. Soc. 137 (1990) 3612.
8. F. Family, Physica A 168 (1990) 561.
9. P. Wojtaszczyk, A Mathematical Introduction to Wavelets, Cambridge University Press, Cambridge, MA, 1997.
10. I. Daubechis, Ten lectures on Wavelets, CBMS, NSF Series in Applied Mathematics, vol. 61, SLAM Publications, Philadelphia, PA, 1992.
11. J.D. Scargle, T.Y. Steinman-Cameron, K. Young, D.L. Donoho, J.P. Crutchfield, J. Imamura, Astrophys. J. 411 (1993) L91-L94.
12. S. Das Sarma, S.V. Ghaisas, Phys. Rev. Lett. 69 (26) (1992) 3762.
13. M. Kardar, G. Parisi, Y.C. Zhang, Phys. Rev. Lett. 56 (1986) 889.