Measuring efficiency of semiconductor manufacturing operations using Data Envelopment Analysis (DEA)

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2000, Pages 56-62

  Carbone, Thomas A ^a  

^a IEEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENCHMARKING; DATA REDUCTION; PROCESS CONTROL;

DATA ENVELOPMENT ANALYSIS (DEA);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034484185     PISSN: None     EISSN: None     Source Type: Journal    
DOI: 10.1109/ASMC.2000.902558     Document Type: Article

References (11)

1. C. Charnes W. Cooper E. Rhodes Measuring the Efficiency of Decision Making Units European Journal of Operations Research 2 6 429 444 1978
2. L. Sattler R. Schlueter Semiconductor Metrics: Conflicting Goals or Increasing Opportunities? IEEE/SEMI Advanced Semiconductor Manufacturing Conference IEEE/SEMI Advanced Semiconductor Manufacturing Conference 1998-Sept.
3. R. Leachman D. Hodges Benchmarking Semiconductor Manufacturing IEEE Transactions on Semiconductor Manufacturing 9 2 May 1996
4. M. Khouja The use of Data Envelopment Analysis for technology selection Computers ind. Engng 28/1 123 132 1995
5. J. R. Doyle R. H. Green Comparing products using Data Envelopment Analysis OMEGA Int. Journal of Management Science 19/6 631 638 1991
6. R. S. Barr L. M. Seiford T. F. Siems An envelopment-analysis approach to measuring the managerial efficiency of banks Annals of Operations Research 45 1 19 1993
7. W. Cooper A. Lewin L. Seiford Data Envelopment Analysis: Theory, Methodology and Applications 1997 Kluwer Academic Publishers Massachusetts
8. R. D. Banker A. Charnes W. W. Cooper Some models for estimating technical and scale inefficiencies in Data Envelopment Analysis Management Science 30/9 1078 1092 1984
9. K. Epstein J. Henderson Data Envelopment Analysis for managerial control and diagnosis Decision Sciences 20 90 119 1989
10. B. Golany Y. Roll Data Envelopment Analysis: Theory, Methodology and Applications 1997 Kluwer Academic Publishers Massachusetts Incorporating Standards Via DEA