Raman spectroscopy and microhardness of ion-implanted a-C:H-films

Ceramics International

Volumn 26, Issue 1, 2000, Pages 29-32

  Artamonov, Victor ^a   Klyui, Nickolai ^a   Perez Rodriguez, A ^b   Romanyuk, Andriy ^a   Semenovich, Victor ^c   Valakh, Mikhail ^a   Visotski, Volodymyr ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

^b UNIVERSITY OF BARCELONA   (Spain)

^c BAKUL INSTITUTE FOR SUPERHARD MATERIALS   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; ELASTIC MODULI; ION IMPLANTATION; MICROHARDNESS; OPTICAL PROPERTIES; RAMAN SPECTROSCOPY;

HYDROGENATED AMORPHOUS CARBON FILMS;

CERAMIC MATERIALS;

EID: 0034461458     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0272-8842(99)00015-2     Document Type: Article

References (12)

1. M. Iwaki, K. Takahashi, A. Sckiguchi, Diamond Relat. Mater. 3 (1993) 47.
2. H. Watanabe, K. Awazu, H. Yoshida, K. Takahashi, M. Iwaki, Diamond Relat. Mater. 3 (1994) 1117.
3. D.G. McCulloch, S. Prawer, A. Hoffman. Phys. Rev. B50 (1994) 5094.
4. D.G. McCulloch, A. Hoffman, S. Prawer, J. Appl. Phys. 74 (1993) 135.
5. N.I. Klyui, V.G. Litovchenko, S.I. Frolov, B.N. Romanyuk, V.A. Mitus, V.A. Semenovich, S.N. Dub, Functional Materials 2 (1995) 469 (in Ukraine).
6. S.P. Withrow, J.M. Willians, S. Prawer, D. Barbara, J. Appl. Phys. 78 (1995) 3060.
7. D. Nir, Thin Solid Films, 112 (1984) 41.
8. H. Xin, W-P. Xu, X. Shi, H. Zhu, C. Lin, S. Zou, Appl. Phys. Lett. 66 (1995) 3290.
9. D.F. Franceschini, C.A. Achete, F.L. Freire, W. Beyer, G. Mariotto, Diamond Relat. Mater., 3 (1993) 88.
10. D.H. Lee, B. Park, D.B. Poker, L. Riester, Z.C. Feng, J.E.E. Baglin, J. Appl. Phys. 80 (1996) 1480.
11. M. Yoshikawa, Mat. Sci. Forum 52 & 53 (1990) 365.
12. P. Deak, A. Gali, G. Sczigler, H. Ehrhardt, Diamond Relat. Mater. 4 (1995) 706.