A micromachining post-process module for RF silicon technology

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2000, Pages 481-484

  Pham, N P ^a   Ng, K T ^a   Bartek, M ^a   Sarro, P M ^a   Rejaei, B ^a   Burghartz, J N ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COUPLED CIRCUITS; ELECTRIC INDUCTORS; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUITS; MICROMACHINING; MULTICHIP MODULES; NATURAL FREQUENCIES; SUBSTRATES;

POST-PROCESS MODULE; SILICON SUBSTRATE;

SILICON WAFERS;

EID: 0034454824     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)