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Volumn , Issue , 2000, Pages 87-89
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Reduction of metal-semiconductor contact resistance by embedded nanocrystals
a
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Author keywords
[No Author keywords available]
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Indexed keywords
DOPING (ADDITIVES);
ELECTRIC FIELDS;
ELECTRON TUNNELING;
MOSFET DEVICES;
NANOSTRUCTURED MATERIALS;
OHMIC CONTACTS;
RAPID THERMAL ANNEALING;
SCANNING ELECTRON MICROSCOPY;
EMBEDDED NANOCRYSTALS;
VLSI CIRCUITS;
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EID: 0034454557
PISSN: 01631918
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (14)
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References (8)
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