Development and application of a computer-supported method for design optimization of microoptical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 108-119

  Sieber, Ingo ^a   Guth, Helmut ^a   Eggert, Horst ^a   Scherer, Klaus Peter ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; MICROOPTICS; OPTIMIZATION;

MICROOPTICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033703073     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)