MOCVD preparation of SBTN thin films from two organometallic source bottles

Integrated Ferroelectrics

Volumn 30, Issue 1-4, 2000, Pages 225-234

  Funakubo, H ^a   Mitsuya, M ^a   Nukaga, N ^a   Ishikawa, K ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

High reproducibility; MOCVD; SrBi2 (Ta0.7Nb0.3)2O9; Two organometallic bottles

Indexed keywords

COMPOSITION; FILM PREPARATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MIXTURES; STRONTIUM COMPOUNDS; THERMAL EFFECTS;

ORGANOMETALLIC SOURCE BOTTLES; STRONTIUM BISMUTH TITANATE;

FERROELECTRIC THIN FILMS;

EID: 0034448666     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580008222271     Document Type: Conference Paper

References (12)