Improvement on ferroelectric properties of metal-organic decomposited PZT thin film prepared by using prenucleation layer

Integrated Ferroelectrics

Volumn 30, Issue 1-4, 2000, Pages 157-164

  Tseng, Yung Kuan ^a   Liu, Kuo Shung ^a   Huang, Shu Fen ^a   Chi, Yun ^a   Lin, I Nan ^b  

^a Department of Materials Science and Engineering ^*  (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

MOD; PZT; Single source precursors; SrRuO3

Indexed keywords

ANNEALING; CRYSTALLIZATION; DECOMPOSITION; DENSIFICATION; FERROELECTRICITY; LEAKAGE CURRENTS; MICROSTRUCTURE; PEROVSKITE; SEMICONDUCTING LEAD COMPOUNDS; SYNTHESIS (CHEMICAL); TEMPERATURE;

FERROELECTRIC PROPERTIES; METAL ORGANIC DECOMPOSITION; POST ANNEALING; SINGLE SOURCE PRECURSORS;

THIN FILMS;

EID: 0034448562     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580008222264     Document Type: Conference Paper

References (14)