An evaluation of the effects of Benzotriazole in NH4OH slurry for copper CMP

Materials Research Society Symposium - Proceedings

Volumn 613, Issue , 2000, Pages

  Len, V S C ^a   McNeill, D W ^a   Gamble, H S ^a  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASION; ADDITION REACTIONS; AMMONIUM COMPOUNDS; CHEMICAL MECHANICAL POLISHING; COMPOSITION EFFECTS; DISSOLUTION; ELECTROMIGRATION; SLURRIES;

AMMONIUM HYDROXIDE; BENZOTRIAZOLE;

COPPER;

EID: 0034433367     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-613-e7.4.1     Document Type: Conference Paper

References (8)