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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 12 B, 2000, Pages 6985-6989

Initial stage of hydrogen etching of Si surfaces investigated by infrared reflection absorption spectroscopy

(4) Noda, Hideyuki a Urisu, Tsuneo b Kobayashi, Yoshihiro c Ogino, Toshio c

a GRADUATE UNIVERSITY FOR ADVANCED STUDIES (Japan)

b INSTITUTE FOR MOLECULAR SCIENCE (Japan)

c NTT Basic Research Laboratories (Japan)

Author keywords

Adjacent dihydride; Buried metal layer; Etching; Hydrogen; Infrared reflection absorption spectroscopy; Si; Trihydride

Indexed keywords

ABSORPTION SPECTROSCOPY; ETCHING; HYDRIDES; HYDROGEN;

INFRARED REFLECTION ABSORPTION SPECTROSCOPY;

SEMICONDUCTING SILICON;

EID: 0034431230 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.39.6985 Document Type: Article

Times cited : (4)

References (19)

1
- 0000462712
- S. M. Gates, R. R. Kunz and C. M. Greenlief: Surf. Sci. 207 (1989) 364.
- (1989) Surf. Sci. , vol.207 , pp. 364
- Gates, S.M.¹ Kunz, R.R.² Greenlief, C.M.³

2
- 0000793032
- C. C. Cheng and J. T. Yates, Jr.: Phys. Rev. B 43 (1991) 4041.
- (1991) Phys. Rev. B , vol.43 , pp. 4041
- Cheng, C.C.¹ Yates Jr., J.T.²

3
- 0001355877
- C. M. Greenlief, S. M. Gates and P. A. Holbert: Chem. Phys. Lett. 159 (1989) 202.
- (1989) Chem. Phys. Lett. , vol.159 , pp. 202
- Greenlief, C.M.¹ Gates, S.M.² Holbert, P.A.³

4
- 0026624374
- J. J. Boland: Surf. Sci. 261 (1992) 17.
- (1992) Surf. Sci. , vol.261 , pp. 17
- Boland, J.J.¹

5
- 36449009639
- Y. Wei, L. Li and I. S. T. Tsong: Appl. Phys. Lett. 66 (1995) 1818.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1818
- Wei, Y.¹ Li, L.² Tsong, I.S.T.³

6
- 6144269912
- Y. J. Chabal and K. Raghavachari: Phys. Rev. Lett. 54 (1985) 1055.
- (1985) Phys. Rev. Lett. , vol.54 , pp. 1055
- Chabal, Y.J.¹ Raghavachari, K.²

7
- 0000538963
- Y. J. Chabal, G. S. Higashi and S. B. Christman: Phys. Rev. B 28 (1983) 4472.
- (1983) Phys. Rev. B , vol.28 , pp. 4472
- Chabal, Y.J.¹ Higashi, G.S.² Christman, S.B.³

8
- 36549094322
- U. Jansson and K. J. Uram: J. Chem. Phys. 91 (1989) 7978.
- (1989) J. Chem. Phys. , vol.91 , pp. 7978
- Jansson, U.¹ Uram, K.J.²

9
- 0026415102
- W. Erley, R. Butz and S. Mantl: Surf. Sci. 248 (1991) 193.
- (1991) Surf. Sci. , vol.248 , pp. 193
- Erley, W.¹ Butz, R.² Mantl, S.³

10
- 84955044135
- V. M. Bermudez: J. Vac. Sci. & Technol. A 10 (1992) 152.
- (1992) J. Vac. Sci. & Technol. A , vol.10 , pp. 152
- Bermudez, V.M.¹

11
- 0001181205
- A. Yoshigoe, K. Mase, Y. Tsusaka, T. Urisu, Y. Kobayashi and T. Ogino: Appl. Phys. Lett. 67 (1995) 2364.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2364
- Yoshigoe, A.¹ Mase, K.² Tsusaka, Y.³ Urisu, T.⁴ Kobayashi, Y.⁵ Ogino, T.⁶

12
- 0030414434
- Y. Kobayashi and T. Ogino: Surf. Sci. 368 (1996) 102.
- (1996) Surf. Sci. , vol.368 , pp. 102
- Kobayashi, Y.¹ Ogino, T.²

13
- 0000088294
- H. Noda and T. Urisu: Chem. Phys. Lett. 326 (2000) 163.
- (2000) Chem. Phys. Lett. , vol.326 , pp. 163
- Noda, H.¹ Urisu, T.²

14
- 35949008358
- J. E. Northrup: Phys. Rev. B 44 (1991) 1419.
- (1991) Phys. Rev. B , vol.44 , pp. 1419
- Northrup, J.E.¹

15
- 0000415984
- S. Watanabe: J. Chem. Phys. 108 (1998) 5965.
- (1998) J. Chem. Phys. , vol.108 , pp. 5965
- Watanabe, S.¹

16
- 0001697463
- H. S. Gutowsky and E. O. Stejskal: J. Chem. Phys. 22 (1954) 939.
- (1954) J. Chem. Phys. , vol.22 , pp. 939
- Gutowsky, H.S.¹ Stejskal, E.O.²

17
- 0026116932
- J. J. Boland: Surf. Sci. 244 (1991) 1.
- (1991) Surf. Sci. , vol.244 , pp. 1
- Boland, J.J.¹

18
- 0029256265
- F. Owman and P. Martensson: Surf. Sci. 324 (1995) 211.
- (1995) Surf. Sci. , vol.324 , pp. 211
- Owman, F.¹ Martensson, P.²

19
- 0012771787
- I. Ohdomari: Surf. Sci. Lett. 227 (1990) 125.
- (1990) Surf. Sci. Lett. , vol.227 , pp. 125
- Ohdomari, I.¹

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