Studies of copper surfaces modified by thermal and plasma treatments

Materials Research Society Symposium - Proceedings

Volumn 612, Issue , 2000, Pages

  Beyer, G P ^a   Baklanov, M ^a   Conard, T ^a   Maex, K ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COPPER; ELLIPSOMETRY; INTEGRATED CIRCUIT LAYOUT; METALLIC FILMS; PASSIVATION; PLASMA APPLICATIONS;

PLASMA TREATMENTS;

SURFACE PHENOMENA;

EID: 0034431093     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-612-d9.17.1     Document Type: Conference Paper

References (4)