SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 609, Issue , 2000, Pages

Device quality silicon carbon thin films

(2) Gemmer, C a Schubert, M B a

a UNIVERSITY OF STUTTGART (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CARRIER CONCENTRATION; ENERGY GAP; HYDROGENATION; NANOSTRUCTURED MATERIALS; OPTOELECTRONIC DEVICES; PHASE TRANSITIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON CARBIDE;

DILUTION RATIOS;

THIN FILMS;

EID: 0034428215 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-609-a23.3 Document Type: Conference Paper

Times cited : (4)

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