Isotropic piezoresistance in polycrystalline silicon for in-plane shear- and normal-stress gauges

Sensors and Materials

Volumn 12, Issue 8, 2000, Pages 473-488

  Toriyama, Toshiyuki ^a   Yokoyama, Yoshihiko ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

In plane shear; Isotropy; Piezoresistance; Polycrystalline silicon; Stress gauge

Indexed keywords

EID: 0034355802     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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