Calibration procedure for piezoresistance coefficients of polysilicon sheets and application to a stress test chip

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 475-479

  Bossche, Andre ^a   Mollinger, Jeff R ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Calibration; Piezoresistance coefficients; Polysilicon sheets; Stress test chips

Indexed keywords

ANISOTROPY; CALIBRATION; ELECTRIC RESISTANCE; PIEZOELECTRIC DEVICES; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON;

PIEZORESISTANCE COEFFICIENTS; PIEZORESISTORS; POLYSILICON SHEETS; STRESS TEST CHIPS;

RESISTORS;

EID: 0031176765     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01425-2     Document Type: Article

References (1)

1. J.F. Nye, Physical Properties of Crystals, Clarendon Press, Oxford, 1985.