Structural defects in 6H-SiC substrates and their effect on the sublimation growth of epitaxial layers in vacuum

Physics of the Solid State

Volumn 42, Issue 8, 2000, Pages 1422-1426

  Sorokin, L M ^a   Tregubova, A S ^a   Shcheglov, M P ^a   Lebedev, A A ^a   Savkina, N S ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034336509     PISSN: 10637834     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1307045     Document Type: Article

References (8)

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