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Volumn 33, Issue 21, 2000, Pages 2781-2785
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Potential formation near negative charge collecting substrate in negative ion plasma
a
SAGA UNIVERSITY
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
ELECTRIC FIELD EFFECTS;
NEGATIVE IONS;
SUBSTRATES;
SULFUR COMPOUNDS;
ENERGY DISTRIBUTION FUNCTIONS;
PLASMA SHEATHS;
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EID: 0034323058
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/33/21/317 Document Type: Article |
Times cited : (4)
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References (22)
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